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Patterned silicon-on-insulator technology for RF Power LDMOSFET

โœ Scribed by Xinhong Cheng; Zhaorui Song; Yemin Dong; Yuehui Yu; DaShen Shen

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
227 KB
Volume
81
Category
Article
ISSN
0167-9317

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Silicon-on-insulator technology for high
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โœ Jacek Korec ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 538 KB

The motivation to develop high-temperature resistant smart-power products and the impact of silicon-on-insulator (SOI) technology are discussed. The electrical and thermal behaviour of devices on SOI-substrates is illustrated, with examples, showing that smart-power integrated circuits can be design