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Patterned deposition by plasma enhanced spatial atomic layer deposition

✍ Scribed by Paul Poodt; Bas Kniknie; Annalisa Branca; Hans Winands; Fred Roozeboom

Book ID: 112183113
Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 557 KB
Volume: 5
Category: Article
ISSN: 1862-6254
DOI: 10.1002/pssr.201004542

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