Toshiba has purchased a Vektor X-ray diffraction tool from Accent Optical Technologies, a supplier of lattice engineering and photolithography process control tools. Toshiba will use the tool for DVD laser manufacturing at its Kitakyushu facility.
Passivation of InP-based HBTs
β Scribed by Z. Jin; K. Uchida; S. Nozaki; W. Prost; F.-J. Tegude
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 382 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.
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## Abstract The effects of various surface preparation procedures, including chemical treatments in HF, HNO~3~, __o__βH~3~PO~4~ and H~2~SO~4~ solutions and anodic oxidation, on the passivating properties of InP have been investigated in order to optimize the fabrication procedures of __n__^+^__p__
that exists between the p + InGaAs and the 2DEG in the channel exhibits low leakage and a high breakdown voltage. More importantly, the gate-to-channel separation is determined solely by MBE growth, which leads to high threshold uniformity. Any problems of gate contact resistance are addressed by ve
In this paper, a 5-GHz fully integrated voltage-controlled oscillator (VCO) using an InP-based RTD/HBT technology is demonstrated for the first time. A figure of merit for the oscillator is obtained to be Οͺ180.8 dBc/Hz. In addition, the VCO has demonstrated a wide tuning range of 710 MHz at 5 GHz.