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Passivation of dopants in InGaP using ECR hydrogenation

โœ Scribed by J.W. Lee; S.J. Pearton; C.R. Abernathy; W.S. Hobson; F. Ren


Book ID
103955120
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
454 KB
Volume
38
Category
Article
ISSN
0921-5107

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Passivation of dislocations in silicon b
โœ I. Perichaud; H.El Ghitani; S. Martinuzzi ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 258 KB

We have studied by electrolyte electroreflectance and photoluminescence a GaAs/AIGaAs resonant tunneling structure (RTS) with a highly n-doped GaAs cap, before and after hydrogenation. We measured the amount of passivation of shallow donor states and of deep traps in the cap and found the approximat