𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Passivation of copper–hafnium thin films using self-forming hafnium oxide

✍ Scribed by Fang, J.S.; Chen, Y.T.


Book ID
122628710
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
866 KB
Volume
231
Category
Article
ISSN
0257-8972

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Ferroelectricity in hafnium oxide thin f
✍ Boscke, T. S.; Muller, J.; Brauhaus, D.; Schroder, U.; Bottger, U. 📂 Article 📅 2011 🏛 American Institute of Physics 🌐 English ⚖ 920 KB
Preparation of hafnium oxide thin film b
✍ Su Xing; Ninglin Zhang; Zhitang Song; Qinwo Shen; Chenlu Lin 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 152 KB

Electron beam evaporation was employed to deposit hafnium on silicon (100) substrate, followed by a rapid thermal oxidation process to fabricate hafnium dioxide thin film. Hafnium was transformed to hafnium oxide above a oxidizing temperature of 500 8C. An interfacial layer of hafnium silicate was o