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Parallel assembly of microsystems using Si micro electro mechanical systems

✍ Scribed by G. Skidmore; M. Ellis; A. Geisberger; K. Tsui; R. Saini; T. Huang; J. Randall

Book ID: 114155541
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 384 KB
Volume: 67-68
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00100-x

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