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[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer

✍ Scribed by Hopcroft, M.A.; Agarwal, M.; Park, K.K.; Kim, B.; Jha, C.M.; Candler, R.N.; Yama, G.; Murmann, B.; Kenny, T.W.

Book ID: 115447944
Publisher: IEEE
Year: 2006
Weight: 731 KB
Volume: 0
Category: Article
ISBN-13: 9780780394759
DOI: 10.1109/memsys.2006.1627776

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