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[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes

✍ Scribed by Alper, S.E.; Azgin, K.; Akin, T.

Book ID: 111657173
Publisher: IEEE
Year: 2006
Weight: 918 KB
Volume: 0
Category: Article
ISBN-13: 9780780394759
DOI: 10.1109/memsys.2006.1627738

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