[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Micro electret power generator

[IEEE IEEE Sixteenth Annual Internationa

[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Fabrication of 3D microstructures with inclined/rotated UV lithography

✍ Han, M.; Woonseob Lee, ; Sung-Keun Lee, ; Lee, S.S. 📂 Article 📅 2003 🏛 IEEE ⚖ 272 KB

[IEEE IEEE Sixteenth Annual Internationa

[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Focused ion beam (FIB) nano-machining and FIB Moire technique for strain analysis in MEMS/NEMS structures and devices

✍ Biao Li, ; Xiaosong Tang, ; Huimin Xie, ; Xin Zhang, 📂 Article 📅 2003 🏛 IEEE ⚖ 357 KB

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Spiked biopotential electrodes

✍ Griss, P.; Enoksson, P.; Tolvanen-Laakso, H.; Merilainen, P.; Ollmar, S.; Stemme 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 608 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE 19th IEEE International Conference

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Ultra-Low Voltage MEMS Resonator Based on RSG-MOSFET

✍ Abele, N.; Segueni, K.; Boucart, K.; Casset, F.; Legrand, B.; Buchaillot, L.; An 📂 Article 📅 2006 🏛 IEEE ⚖ 444 KB

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Deep reactive ion etching of Pyrex glass

✍ Li, X.; Abe, T.; Esashi, M. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 472 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE 19th IEEE International Conference

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes

✍ Alper, S.E.; Azgin, K.; Akin, T. 📂 Article 📅 2006 🏛 IEEE ⚖ 918 KB