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[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Focused ion beam (FIB) nano-machining and FIB Moire technique for strain analysis in MEMS/NEMS structures and devices

✍ Scribed by Biao Li, ; Xiaosong Tang, ; Huimin Xie, ; Xin Zhang,

No coin nor oath required. For personal study only.

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