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[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Fabrication of 3D microstructures with inclined/rotated UV lithography

✍ Scribed by Han, M.; Woonseob Lee, ; Sung-Keun Lee, ; Lee, S.S.

Book ID: 118175432
Publisher: IEEE
Year: 2003
Weight: 272 KB
Volume: 0
Category: Article
ISBN-13: 9780780377448
DOI: 10.1109/memsys.2003.1189809

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