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Pad effects on material-removal rate in chemical-mechanical planarization

✍ Scribed by Ashraf Bastawros; Abhijit Chandra; Yongjin Guo; Bo Yan

Book ID: 107452737
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 1021 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0038-2

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