Oxygen transfer ways for the laser deposition in-situ of the oxide HTSC films

✍ Scribed by M.R. Predtechensky; A.N. Smal; B.A. Kolesov; V.P. Ivanov

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 318 KB
• Volume: 1
• Category: Article
• ISSN: 0964-1807
• DOI: 10.1016/0964-1807(93)90348-6

✦ Synopsis

Oxygen transfer ways for the mathod of the laser deposition of YBaCuO films in an oxygen ambient and influence of the 0 been studied using wen pressure on film properties have 0 isotope. It was shown rrore then 40% of the oxygen are transferred into the films from the target and about of 60% from the oxygen ambient at the deposition. During the cooling of the films about 90% of the film oxygen were exchanged with the environrrrent atmos by @e;;e I&wai,f,U, that substitution of 160 ambient alteration in the oxygen pressure result in essential changes of the film quality. On the basis of the results, conclusions for laser deposition are made. The method of the laser deposition in an oxygen ambient (LDO) is the perspective mthod for growth in-situ high Tc superconducting films on different substrates [1,2,31. Oxygen saturation of YBCO films in the ethod LDO and influence of the oxygen pressure on the film properties are the important questions to be solved to optimize technological deposition conditions. Using of "0 isotope allows us to determine where from (target or oxygen ambient) and on what stage oxygen cortw?s into the films and to derronstrate the influence of rtolecular mass of ambient oxygen on the growth and properties of the YBCO films. The experimnts were performad in a chamber used for laser deposition of HTSC films described in [4]. Pulse YAG laser (1.06 pm,20 ns, 5~10~ W/cm') was used. The oxygen pressure PO at the deposition was changed in the range of 0.1-l Torr. The substrate temperature at a 2005 2006 World Congress on Superconductivity deposition was about of 750°C. The isotopically enriched YBazCua07-x