✦ LIBER ✦
Geometrical factors affecting the CO2 laser chemical vapour deposition of silicon oxide films in parallel configuration
✍ Scribed by D. Fernández; P. González; J. Pou; E. García; B. León; M. Pérez-Amor
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 614 KB
- Volume
- 220
- Category
- Article
- ISSN
- 0040-6090
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