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Oxygen-Related Thermal Donor Formation in Dopant-Rich Compensated Czochralski Silicon

✍ Scribed by Tanay, Florent; Dubois, Sebastien; Veirman, Jordi; Enjalbert, Nicolas; Stendera, Julie; Perichaud, Isabelle

Book ID
121864926
Publisher
IEEE
Year
2014
Tongue
English
Weight
410 KB
Volume
61
Category
Article
ISSN
0018-9383

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