Thermal donors formation via isothermal annealing in magnetic Czochralski high resistivity silicon

✍ Scribed by Bruzzi, Mara; Menichelli, David; Scaringella, Monica; Härkönen, Jaakko; Tuovinen, Esa; Li, Zheng

• Book ID: 120072477
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 882 KB
• Volume: 99
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2192307