𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Oxygen-induced physical property variation of deposited ZnO films by metal–organic chemical vapor deposition

✍ Scribed by Zhifeng Shi; Shikai Zhang; Bin Wu; Xupu Cai; Jinxiang Zhang; Wei Yin; Hui Wang; Jin Wang; Xiaochuan Xia; Xin Dong; Baolin Zhang; Guotong Du


Book ID
116245342
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
1012 KB
Volume
258
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Annealing effects on electrical and opti
✍ Jingchang Sun; Hongwei Liang; Jianze Zhao; Qiuju Feng; Jiming Bian; Ziwen Zhao; 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 575 KB

## 2. Experimental procedures ZnO film was deposited on the SI-GaAs (100) substrate by MOCVD. Diethylzinc (DEZn) and O 2 were chosen as precursor of Zn and O, respectively, and high purity Ar was used as the carrying gas for DEZn. The mol flux ratio of Zn to O was kept at 1:250. The