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Oxidation Resistance of Copper Alloy Thin Films Formed by Chemical Vapor Deposition

✍ Scribed by Atanasova, P.; Bhaskaran, V.; Kodas, T.; Hampden-Smith, M.

Book ID
121224611
Publisher
Cambridge University Press
Year
1996
Weight
395 KB
Volume
428
Category
Article
ISSN
0272-9172

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## Abstract Cu~2~O thin films were grown on sapphire (0001) and MgO (100) substrates by chemical vapor deposition. The crystalline, vibrational and electrical properties of the layers and the amount of incorporated background impurities have been examined. X‐ray diffraction measurements revealed, t