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Graphitization of thin films formed by focused-ion-beam chemical-vapor-deposition

โœ Scribed by Kanda, Kazuhiro; Yamada, Noriko; Okada, Makoto; Igaki, Jun-ya; Kometani, Reo; Matsui, Shinji


Book ID
120369177
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
287 KB
Volume
18
Category
Article
ISSN
0925-9635

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Bimorph nano actuators synthesized by fo
โœ Jiyoung Chang; Byung-Kwon Min; Jongbaeg Kim; Liwei Lin ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 489 KB

Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Severa