✦ LIBER ✦

Oxidation of very low energy nitrogen-implanted strained-silicon

✍ Scribed by N. Kelaidis; D. Skarlatos; V. Ioannou-Sougleridis; C. Tsamis; Ph. Komninou; B. Kellerman; M. Seacrist

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Interstitial injection during oxidation

✍ D. Skarlatos; C. Tsamis; M. Perego; M. Fanciulli; D. Tsoukalas 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Study of low-energy hydrogen implantatio

✍ K Srikanth; S Ashok 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 379 KB

Some annealing properties of low-energy-

✍ S.M. Ku; W.K. Chu 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 454 KB

Injection of point defects during anneal

✍ C. Tsamis; D. Skarlatos; V. Valamontes; D. Tsoukalas; G. BenAssayag; A. Claverie 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 223 KB

Angular dependence of silicon oxide form

✍ N. Menzel; K. Wittmaack 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 416 KB

Low energy ion-beam post hydrogenation o

✍ R. Galloni; M. Ruth; A. Desalvo; Y.S. Tsuo 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 229 KB