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Low energy ion-beam post hydrogenation of phosphor implanted amorphous silicon films

✍ Scribed by R. Galloni; M. Ruth; A. Desalvo; Y.S. Tsuo

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 229 KB
Volume: 170
Category: Article
ISSN: 0921-4526
DOI: 10.1016/0921-4526(91)90137-4

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