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Oxidation of silicon by low energy oxygen ions

✍ Scribed by J.S. Williams; K.T. Short; M. Petravic; B.G. Svensson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Segregation effects in SIMS profiling of

✍ M. Petravić; B.G. Svensson; J.S. Williams; J.M. Glasko 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 438 KB

Formation of thin silicon films using lo

✍ A.K. Robinson; C.D. Marsh; U. Bussmann; J.A. Kilner; Y. Li; J. Vanhellemont; K.J 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 856 KB

Damage induced by high energy multiply c

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Spectrometry of low-energy ions by surfa

✍ G. F. Bogdanov; B. P. Maksimenko 📂 Article 📅 1972 🏛 Springer US 🌐 English ⚖ 149 KB

Oxidation kinetics of low-oxygen silicon

✍ T. Shimoo; F. Toyoda; K. Okamura 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 91 KB

Oxygen gettering in low-energy arsenic o

✍ Oberemok, O.; Kladko, V.; Litovchenko, V.; Romanyuk, B.; Popov, V.; Melnik, V.; 📂 Article 📅 2014 🏛 John Wiley and Sons 🌐 English ⚖ 908 KB