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Oxidation of Nitrided Si(100) by Gaseous Atomic and Molecular Oxygen

✍ Scribed by Gerrard, Alex L.; Chen, Jau-Jiun; Weaver, Jason F.

Book ID: 120980886
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 287 KB
Volume: 109
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp044434i

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