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The reaction of atomic oxygen with Si(100) and Si(111) : I. Oxide decomposition, active oxidation and the transition to passive oxidation

✍ Scribed by J.R. Engstrom; D.J. Bonser; M.M. Nelson; Thomas Engel


Publisher
Elsevier Science
Year
1991
Weight
73 KB
Volume
256
Category
Article
ISSN
0167-2584

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