Parallel oxidation model for Si including both molecular and atomic oxygen mechanisms

✍ Scribed by J.M. Delarios; C.R. Helms; D.B. Kao; B.E. Deal

• Book ID: 103615275
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 437 KB
• Volume: 39
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90422-4