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Oxidation of Ni(Pt)Si by molecular vs. atomic oxygen

✍ Scribed by Sudha Manandhar; Brian Copp; J.A. Kelber

Book ID
108060671
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
425 KB
Volume
254
Category
Article
ISSN
0169-4332

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Fabrication of atomically defined oxide
Fabrication of atomically defined oxide films on Si by laser molecular beam epitaxy
✍ H. Koinuma; T. Ohnishi; T. Maeda; M.B. Lee; M. Kawasaki; M. Yoshimoto πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 337 KB

Laser molecular beam epitaxy (MBE) has been verified to be a tool especially useful for fabricating epitaxial oxide films with atmically defined interface and thickness. We report here two cases of laser MBE applied successfully to heteroepitaxial growths of oxide films on Si; dielectric BaTiO 3 fil