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Oxidation behaviour of Cu thin films on Si wafer at 175–400°C

✍ Scribed by W. Gao; H. Gong; J. He; A. Thomas; L. Chan; S. Li


Book ID
117356393
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
337 KB
Volume
51
Category
Article
ISSN
0167-577X

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