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Epitaxial growth of Cu thin films on atomically cleaned (111)Si at room temperature

โœ Scribed by C.S. Liu; S.R. Chen; W.J. Chen; L.J. Chen


Book ID
113300171
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
565 KB
Volume
36
Category
Article
ISSN
0254-0584

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