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Origin and FEM-assisted evaluation of residual stress in thermally oxidized porous silicon

✍ Scribed by Géza Tóth; Krisztián Kordás; Andrea Edit Pap; Jouko Vähäkangas; Antti Uusimäki; Seppo Leppävuori

Book ID: 116374422
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 261 KB
Volume: 34
Category: Article
ISSN: 0927-0256
DOI: 10.1016/j.commatsci.2004.12.071

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