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Mechanical stress in structures formed by thermal oxidation of amorphous and crystalline silicon

✍ Scribed by Szekeres, A; Danesh, P

Book ID: 121080506
Publisher: Institute of Physics
Year: 1996
Tongue: English
Weight: 108 KB
Volume: 11
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/11/8/019

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