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CVD silicon structures formed by amorphous and crystalline growth

✍ Scribed by A.M. Beers; H.T.J.M. Hintzen; H.G. Schaeken; J. Bloem

Book ID: 103166688
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 998 KB
Volume: 64
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(83)90342-1

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