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Organosilicon Polymers Deposition by PECVD and RPECVD on Micropatterned Substrates

✍ Scribed by Philippe Supiot; Céline Vivien; Karine Blary; Vincent Rouessac

Book ID
102135410
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
474 KB
Volume
17
Category
Article
ISSN
0948-1907

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