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Organometallic Ruthenium Source Reagents for CVD

✍ Scribed by F.-J. Lee; Y. Chi; C.-S. Liu; P.-F. Hsu; T.-Y. Chou; S.-M. Peng; G.-H. Lee

Book ID: 101370219
Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 256 KB
Volume: 7
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(200105)7:3<99::aid-cvde99>3.0.co;2-h

No coin nor oath required. For personal study only.

✦ Synopsis

Republic of China) [**] We thank the National Sciences Council of Taiwan (NSC 89-2113-M007-022) for support of the work.

Fig. 1. ORTEP drawing of complex 1 with thermal ellipsoids shown at the 50 % probability level. Selected bond distances: Ru±C(1) = 1.900(4) , Ru± C(2) = 1.896(3) , Ru±O(3) = 2.052(2) , Ru±O(4) = 2.081(2) , Ru±O(5) = 2.050(2) , and Ru±O(6) = 2.075(2)

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