ChemInform Abstract: Self-Reducible CuII Source Reagents for the CVD of Copper.

✍ Scribed by Peng-Fu Hsu; Tsung-Wu Lin; Chao-Shiuan Liu; Arthur J. Carty; Shie-Ming Peng

• Book ID: 101914387
• Publisher: John Wiley and Sons
• Year: 2001
• Weight: 40 KB
• Volume: 32
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.200118217

✦ Synopsis

Abstract

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