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Optimized ion beam raster for SIMS sputter depth profiling

✍ Scribed by D. F. Mitchell; J. S. Arlow; J. R. Phillips; G. I. Sproule

Book ID
104592315
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
688 KB
Volume
14
Category
Article
ISSN
0142-2421

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Influence of ion mixing, ion beam-induce
Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces
✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf