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Edge-effects correction in depth profiles obtained by ion-beam sputtering

✍ Scribed by I.S.T. Tsong; G.L. Power; D.W. Hoffman; C.W. Magee

Publisher: Elsevier Science
Year: 1980
Weight: 388 KB
Volume: 168
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(80)91283-5

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