Factorial analysis of cluster-SIMS depth profiling using metal-cluster-complex ion beams

✍ Scribed by Yukio Fujiwara; Kouji Kondou; Kouji Watanabe; Hidehiko Nonaka; Naoaki Saito; Toshiyuki Fujimoto; Akira Kurokawa; Shingo Ichimura; Mitsuhiro Tomita

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 335 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.014