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Optimization of the Vaporization of Liquid and Solid CVD Precursors: Experimental and Modeling Approaches

✍ Scribed by F. Maury; F.-D. Duminica; F. Senocq

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 364 KB
Volume: 13
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200706600

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