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Experimental Characterization and Modeling of Pulsed MOCVD with Ultrasonic Atomization of Liquid Precursor

โœ Scribed by S. P. Krumdieck; R. Raj


Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
427 KB
Volume
7
Category
Article
ISSN
0948-1907

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โœ Marcus Morstein; Imre Pozsgai; Nicholas D. Spencer ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 639 KB

The new mixed alcoholato-acetylacetonato precursor Zr(acac) 2 (hfip) 2 , where hfip = OCH(CF 3 ) 2 , has been used to deposit zirconia at temperatures between 350 and 700 C. This compound, a liquid at room temperature, combines a high vapor pressure with a relatively low hydrolysis sensitivity. At 0