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Optimization and Structural Characterization of W/Al 2 O 3 Nanolaminates Grown Using Atomic Layer Deposition Techniques

✍ Scribed by Sechrist, Z. A.; Fabreguette, F. H.; Heintz, O.; Phung, T. M.; Johnson, D. C.; George, S. M.

Book ID: 125543861
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 440 KB
Volume: 17
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm050470y

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