Optical properties of mixed phase a-C/diamond films deposited by dc magnetron sputtering of vitreous carbon target

✍ Scribed by S.N. Kundu; M Basu; K.K. Chattopadhyay; A.B. Maity; S Chaudhuri; A.K. Pal

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 944 KB
• Volume: 48
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(96)00306-5

✦ Synopsis

Mixed phase a-C/diamond

films were deposited on glass and fused silica substrates by dc magnetron sputtering of a vitreous carbon target in argon plasma. The optical characterization of the films, deposited at zero bias voltage, (V, = 0) indicated a high band gap (EB > 3 eV). E, increased further when deposited with negative bias voltage (V,= -100 V). The variations of stress (0.5-4 GPa) and strain (0.6x 10e3-8x 10p3) with deposition temperature (300 K < T, < 573 K) were determined by a non-destructive optical technique. The hardness fH,) of the films deposited simultaneously (atT, -573 K) on g/ass, fused silica and silicon substrates indicated a variation within 18-23GPa. FTIR studies of the films deposited on Si indicated high sp" content (> 80%) with predominant C-H stretching modes within 2800-3000cm-'.