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Optical properties of aluminium nitride prepared by chemical and plasmachemical vapour deposition

✍ Scribed by Bauer, J. ;Biste, L. ;Bolze, D.

Publisher
John Wiley and Sons
Year
1977
Tongue
English
Weight
705 KB
Volume
39
Category
Article
ISSN
0031-8965

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πŸ“œ SIMILAR VOLUMES

Chemical and plasmachemical vapour depos
Chemical and plasmachemical vapour deposition of aluminium nitride layers
✍ Prof. Dr. H. Arnold; Dipl.-Chem. L. Biste; Dipl.- Ing. D. Bolze; Dr. G. Eichhorn πŸ“‚ Article πŸ“… 1976 πŸ› John Wiley and Sons 🌐 English βš– 281 KB

## Abstract AIN was deposited pyrolytically by means of the aluminium trichloride‐ammonia process (either introducing both compounds seperately or in complex form) and by plasmachemical reaction of aluminium trichloride with nitrogen at temperatures from 600 to 1300Β°C. Layers deposited onto (100) s