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Optical monitoring of deposition and decomposition processes in MOCVD and MBE using reflectance anisotropy

✍ Scribed by S.R. Armstrong; R.D. Hoare; M.E. Pemble; I.M. Povey; A. Stafford; A.G. Taylor; P. Fawcette; B.A. Joyce; D.R. Klug; J. Neave; J. Zhang

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 643 KB
Volume: 124
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(92)90434-k

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