In-situ optical monitoring of the decomposition process of gaseous sources in metal-organic chemical vapor deposition and atomic layer epitaxy

✍ Scribed by Naoki Kobayashi; Yasuyuki Kobayashi; Yoshiharu Yamauchi; Yoshiji Horikoshi

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 420 KB
• Volume: 60-61
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90473-b