In-Situ Gas-Phase FTIR Monitoring of MOCVD Processes: LaF3 Films Using the Second Generation La(hfac)3·diglyme Precursor

✍ Scribed by G. G. Condorelli; S. Gennaro; I. L. Fragalà

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 563 KB
• Volume: 6
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(200008)6:4<185::aid-cvde185>3.0.co;2-m