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Optical emission spectroscopy of the plasma during microwave CVD of diamond thin films with nitrogen addition and relation to the thin film morphology

✍ Scribed by T Vandevelde; M Nesladek; C Quaeyhaegens; L Stals


Book ID
114086187
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
520 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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