The influence of CH4 addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH4/N2/Ar/hexamethyldisilazane microwave plasma

✍ Scribed by Simon Bulou; Laurent Le Brizoual; Patrice Miska; Ludovic de Poucques; Robert Hugon; Mohammed Belmahi; Jamal Bougdira

• Book ID: 113937179
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 903 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.07.054