Structural and optical properties of a-SiCN thin film synthesised in a microwave plasma at constant temperature and different flow of CH4 added to HMDSN/N2/Ar mixture

✍ Scribed by S. Bulou; L. Le Brizoual; P. Miska; L. de Poucques; R. Hugon; M. Belmahi; J. Bougdira

• Book ID: 113919396
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 556 KB
• Volume: 205
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.02.014