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Lithium addition during CVD diamond growth: influence on the optical emission of the plasma and properties of the films

✍ Scribed by Sternschulte, H.; Schreck, M.; Stritzker, B.; Bergmaier, A.; Dollinger, G.

Book ID
122942721
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
170 KB
Volume
9
Category
Article
ISSN
0925-9635

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## Abstract Understanding the growth mechanisms of phosphorus‐doped diamond is an important issue for the fabrication of n‐type diamond. In this work, the influence of the addition of phosphorus precursor, tertiarybutylphosphine (TBP), on diamond growth mechanism, is investigated. Isolated diamond