𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Influence of tertiarybutylphosphine (TBP) addition on the CVD growth of diamond

✍ Scribed by Frangieh, G. ;Jomard, F. ;Pinault, M.-A. ;Barjon, J.

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
300 KB
Volume
206
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

✦ Synopsis

Abstract

Understanding the growth mechanisms of phosphorus‐doped diamond is an important issue for the fabrication of n‐type diamond. In this work, the influence of the addition of phosphorus precursor, tertiarybutylphosphine (TBP), on diamond growth mechanism, is investigated. Isolated diamond crystallites and polycrystalline diamond films were grown on silicon substrates by microwave plasma assisted chemical vapour deposition (CVD). The growth rate anisotropy is deduced by measuring the facet sizes of crystallites observed in a scanning electron microscope. We show that a small amount of TBP added during diamond growth, has a strong impact on the growth rate anisotropy and on the secondary nucleation. We also show that phosphorus is incorporated in polycrystalline diamond films as observed by secondary ion mass spectrometry.

πŸ“œ SIMILAR VOLUMES

Influence of oxygen addition on the crys
Influence of oxygen addition on the crystal shape of CVD boron doped diamond
✍ Issaoui, R. ;Achard, J. ;Silva, F. ;Tallaire, A. ;Mille, V. ;Gicquel, A. πŸ“‚ Article πŸ“… 2011 πŸ› John Wiley and Sons 🌐 English βš– 401 KB

## Abstract The development of diamond based devices for high power electronic applications requires the growth of thick heavily boron doped diamond. During the growth of CVD single crystals, the final form of the film depends on the different crystalline faces growth rate with respect to each othe

Effect of argon addition on the growth o
Effect of argon addition on the growth of thick single crystal diamond by high-power plasma CVD
✍ Tallaire, Alexandre ;Rond, Catherine ;BΓ©nΓ©dic, Fabien ;Brinza, Ovidiu ;Achard, J πŸ“‚ Article πŸ“… 2011 πŸ› John Wiley and Sons 🌐 English βš– 472 KB

## Abstract Diamond films were synthesized with up to 50% argon in the gas phase using high power plasma‐assisted chemical vapour deposition (PACVD). This resulted in a strong increase of the deposition rates. Polycrystalline diamond (PCD) films grown with Ar have shown a higher incorporation of sp